Corporate Assignee
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
Corporate Assignee
active
No affiliations
Apparatus and method for detecting defects in the surface of...
Calibration standard for calibrating a defect inspection system
Methods and apparatus for identifying the material of a particle
Surface inspection system and method of inspecting surface of wo
Wafer inspection system for distinguishing pits and particles
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