Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1992-06-03
1993-08-31
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156345, H01L 21306, B44C 122
Patent
active
052405567
ABSTRACT:
According to this invention, a surface-treating apparatus capable of etching an object to be treated with high accuracy, suppressing discharging of a harmful gas deposited on the etched object in the air, and preventing the surface of the object from deposition/ attachment of reaction products and droplets is disclosed. The surface-treating apparatus includes a first process chamber for etching a loaded object to be treated by an activated etching gas, an exhausting member for setting the first process chamber at a low pressure, a cooling means for cooling the object loaded in the first process chamber, a second process chamber in which the object etched by the first process chamber is loaded, an exhausting member for setting the second process chamber at a low pressure, and an heating member for annealing the object loaded in the second process chamber.
REFERENCES:
patent: 4838978 (1989-06-01), Sekine et al.
patent: 4878995 (1989-11-01), Arikado et al.
patent: 5078851 (1992-01-01), Nishihata et al.
patent: 5085750 (1992-02-01), Soraoka et al.
Arami Jun-ichi
Ikeda Towl
Ishikawa Yoshio
Iwata Teruo
Powell William A.
Tokyo Electron Limited
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