Surface analyzer for determining the energy distribution of scat

Details Surface analyzer for determining the energy distribution of scat Surface analyzer for determining the energy distribution of scat

1988-05-04

1989-09-12

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250305, H01J 37252, H01J 4946

Patent

active

048662720

ABSTRACT:
A surface analyzer for analyzing the atomic composition of the surface of sample. An ion source generates a proton beam. A magnet directs the proton beam through an accelerating device toward the sample for collision therewith. Protons that are scattered at an angle of 180.degree. pass through the accelerating device in the reverse direction and are decelerated. The magnet directs the protons as a parallel beam to a position detecting device that indicates the position at which the proton beam strikes and energy loss of the protons can be determined.

REFERENCES:
patent: 4584474 (1986-04-01), Franchy et al.
Niftrik et al., Nuclear Instruments and Methods, vol. 93, No. 2 (1971), pp. 301-309.

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