Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1987-07-06
1989-05-09
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
250296, 250297, G01N 2300
Patent
active
048291790
ABSTRACT:
A surface analyzer for analyzing physical properties of the surface of a sample by means of PELS (Proton energy loss spectroscopy) in which accelerated ion beams such as proton beams impinge on the sample in the vertical direction to the surface of the sample and ion beams scattered from the sample are decelerated and then detected by an analyzer to analyze the energy loss of the ion beams. The surface analyzer comprises an ion beam source for generating ion beams, deflecting means for deflecting the ion beams from the ion beam source, irradiating the surface of the sample with the ion beams from the ion beam source in the vertical direction to the surface of the sample, and deflecting scattered ion beams from the sample, accelerating and decelerating means for accelerating the ion beams before the ion beams impinge on the sample and decelerating the scattered ion beams, and analyzing means for detecting the scattered beams and analyzing energy loss of the ion beams.
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Aoki Masahiko
Konishi Masashi
Matsuda Yasuhiro
Okazaki Naoto
Anderson Bruce C.
Aronoff Michael
Nissin Electric Company, Limited
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