Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2008-01-15
2008-01-15
Schuberg, Darren (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
Reexamination Certificate
active
11219459
ABSTRACT:
A novel surface acoustic wave device with a decreased velocity dispersion and a low insertion loss as well as the fabrication method therefor is provided. The surface acoustic wave device includes a substrate, an insulating layer with an indentation on the substrate, a silicon layer with a first portion on the insulating layer and a second portion suspended above the indentation, a piezoelectric layer on the first and the second portions of the silicon layer, and at least an electrode on the piezoelectric layer.
REFERENCES:
patent: 6236141 (2001-05-01), Sato et al.
patent: 6437479 (2002-08-01), Miura et al.
patent: 2004/0007940 (2004-01-01), Tsai et al.
patent: 2005/0067920 (2005-03-01), Weinberg et al.
patent: 2006/0116585 (2006-06-01), Nguyen-Dinh et al.
patent: 2007/0019042 (2007-01-01), Chung et al.
Chen Jyh-Shin
Chen Sheng-Wen
Hu Yi-Chiuen
Kao Hui-Ling
Kung Yu-Sheng
Precision Instrument Development Center National Applied Researc
Rosenau Derek
Schuberg Darren
Volpe and Koenig P.C.
LandOfFree
Surface acoustic wave device and method for fabricating the... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Surface acoustic wave device and method for fabricating the..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Surface acoustic wave device and method for fabricating the... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3908088