Superjunction device and method of manufacture therefor

Details Superjunction device and method of manufacture therefor Superjunction device and method of manufacture therefor

2005-11-29

2005-11-29

Le, Dung A. (Department: 2818)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S234000, C257S328000

Reexamination Certificate

active

06969657

ABSTRACT:
A process for forming a superjunction device that includes a series of implants to form closely spaced implant regions which are linked together by a short thermal step, whereby deep and narrow regions can be formed within a semiconductor body.

REFERENCES:
patent: 6586798 (2003-07-01), Frisina
patent: 6639276 (2003-10-01), Spring et al.

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