Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
Reexamination Certificate
2005-07-05
2005-07-05
Hassanzadeh, P. (Department: 1763)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With measuring, sensing, detection or process control means
C156S345510, C156S345530, C118S724000, C118S728000, C204S192100, C204S298160
Reexamination Certificate
active
06913670
ABSTRACT:
A substrate support has a receiving surface capable of receiving a substrate during processing in a substrate processing chamber. The substrate support has a pedestal having a conduit to circulate a heat transfer fluid therein. A barrier about the conduit includes a fluid detection material capable of detecting a leakage of the fluid from the conduit be changing an attribute, for example, an optical or electrical property.
REFERENCES:
patent: 4297686 (1981-10-01), Tom
patent: 4376514 (1983-03-01), Coffee
patent: 4391846 (1983-07-01), Raymond
patent: 4737474 (1988-04-01), Price et al.
patent: 4922232 (1990-05-01), Bosich
patent: 4966869 (1990-10-01), Hillman et al.
patent: 5138643 (1992-08-01), Sakamoto et al.
patent: 5202667 (1993-04-01), Alvin
patent: 5583737 (1996-12-01), Collins et al.
patent: 5636098 (1997-06-01), Salfelder et al.
patent: 5812361 (1998-09-01), Jones et al.
patent: 6112579 (2000-09-01), Tryba
patent: 6165234 (2000-12-01), Kanakkanatt
patent: 6228804 (2001-05-01), Nakashima
patent: 6303046 (2001-10-01), Risen et al.
patent: 6406545 (2002-06-01), Shoda et al.
patent: 10176971 (1998-06-01), None
patent: 001002 (2000-01-01), None
Bedi Surinder
Douglas Michael
Narendrnath Kadthala R.
Applied Materials Inc.
Hassanzadeh P.
Janah & Associates
Kackar Ram N
LandOfFree
Substrate support having barrier capable of detecting fluid... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Substrate support having barrier capable of detecting fluid..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate support having barrier capable of detecting fluid... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3416257