4. Electricity: electrical systems and devices
  5. Electric charge generating or conducting means
  6. Use of forces of electric charge or field

Surinder Bedi

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Electrostatic chuck with improved temperature control and...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Method and apparatus for monitoring the position of a...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Robot control
Reexamination Certificate

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Multi-electrode electrostatic chuck having fuses in hollow cavit

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Substrate support having barrier capable of detecting fluid...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
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Profile ID: LFUS-PAI-P-1161699

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