Substrate support

Details Substrate support Substrate support

2005-07-12

2005-07-12

Fuqua, Shawntina (Department: 3742)

Electric resistance heating devices

Heating devices

Radiant heater

C219S390000, C219S405000, C219S411000, C392S418000, C118S724000, C118S725000, C118S050100, C118S728000, C118S730000, C414S217000, C384S048000, C193S0350SS, C401S215000

Reexamination Certificate

active

06917755

ABSTRACT:
An apparatus for supporting a substrate is described that has a ball adapted to minimize damage between the substrate support and the substrate supported thereon. In one embodiment, an apparatus for supporting a substrate includes ball disposed on an inclined ball support surface. The ball support surface is adapted to bias the ball toward one side of the ball support surface thereby providing space for the ball to roll as the substrate supported thereon changes in length when exposed to thermal influences. In another embodiment, the apparatus further comprises a cage adapted to capture the ball to the ball support surface.

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