4. Abrasive tool making process, material, or composition
  5. With carbohydrate or reaction product thereof

Akihiro Hosokawa

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Apparatus and method for uniform substrate heating and...

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Apparatus and method of positioning a multizone magnetron...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Apparatus for measuring temperature of wafer

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
Patent

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Automated substrate processing systems and methods

Measuring and testing – Testing of apparatus
Reexamination Certificate

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Automated substrate processing systems and methods

Measuring and testing – Instrument proving or calibrating – Displacement – motion – distance – or position
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Profile ID: LFUS-PAI-P-35997

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