Substrate storage cassette with substrate alignment feature

Details Substrate storage cassette with substrate alignment feature Substrate storage cassette with substrate alignment feature

2005-07-12

2005-07-12

Lillis, Eileen D. (Department: 3652)

Material or article handling

Device for emptying portable receptacle

Nongravity type

C414S810000, C414S936000

Reexamination Certificate

active

06916147

ABSTRACT:
A substrate storage cassette and a method of orienting a substrate disposed therein are provided. In one embodiment, the substrate storage cassette includes a plurality of flanges pairs disposed between a first lateral sidewall coupled in a spaced-apart relation to a second lateral sidewall. Each of the flange pairs adapted to support a substrate thereon. At least a first alignment feature disposed between the flange pair and adapted to mate with an orientation feature of the substrate when the substrate is in a predefined orientation.

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patent: 2002/0014390 (2002-02-01), Shinozuka

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