Substrate proximity processing structures

Details Substrate proximity processing structures Substrate proximity processing structures

2007-09-21

2008-08-05

Perrin, Joseph L (Department: 1792)

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

C134S099100, C134S902000

Reexamination Certificate

active

07406972

ABSTRACT:
An apparatus for generating a fluid meniscus to process a substrate is provided. The apparatus includes a manifold head with a manifold surface having a plurality of conduits configured to generate a fluid meniscus on a substrate surface when positioned proximate the substrate. The manifold head has a plurality of passages capable of communicating fluids with the plurality of conduits. The apparatus also includes an interface membrane attached to a portion of the manifold head. The interface membrane is configured to block a portion of the plurality of conduits during operation.

REFERENCES:
patent: 6230722 (2001-05-01), Mitsumori et al.
patent: 6634732 (2003-10-01), Farr et al.

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