Substrate machining verifier

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

356241, G01B 1100, H01L 2714

Patent

active

051988780

ABSTRACT:
A system for machining and for verifying the machining of substrates includes an energy beam located to impinge upon machined features of the substrates and a photodiode switching circuit matrix for detecting those portions of the energy beam which impinge upon the machined features of the substrate. The photodiode switching circuits include a current boost resistor in parallel with the photodiode which allows greater current to flow through the output diode, thereby increasing its switching speed. Pairs of photodiode circuits of the array are sequentially energized so that dual strings of outputs are produced. These outputs are then multiplexed and digitized. The digital outputs are compared in a verifier controller with a predetermined set of data to determine accuracy of the machining process. Substrates to be machined and verified can be mounted on a single X-Y table so that the machining and verification processes can be accomplished simultaneously.

REFERENCES:
patent: 4425829 (1984-01-01), Kranik et al.
patent: 4448532 (1984-05-01), Joseph et al.
patent: 4508453 (1985-04-01), Hara et al.
patent: 4532650 (1985-07-01), Wihl et al.
patent: 4555798 (1985-11-01), Broadbent, Jr. et al.
patent: 4559603 (1985-12-01), Yoshikawa
patent: 4560273 (1985-12-01), Ando et al.
patent: 4633504 (1986-12-01), Wihl
patent: 4674869 (1987-06-01), Pryor et al.
patent: 4680627 (1987-07-01), Sase et al.
patent: 4692690 (1987-09-01), Hara et al.
patent: 4805123 (1989-02-01), Specht et al.
patent: 4877326 (1989-10-01), Chadwick et al.
patent: 4891682 (1990-01-01), Yusa et al.
patent: 4893346 (1990-01-01), Bishop
patent: 4930890 (1990-06-01), Hara et al.
patent: 5015097 (1991-05-01), Nomoto et al.
IBM Patent Application, Ser. No. 07/428,686, Filed Oct. 30, 1989, M. J. LaPlante et al., "Formation Of High Quality Patterns For Substrates And Apparatus Therefor."
IBM Technical Disclosure Bulletin, vol. 2, No. 4, pp. 98-100, Dec. 1959, F. J. Droege et al., "Hole Count Verifier."
IBM Technical Disclosure Bulletin, vol. 23, No. 9, pp. 4076-4077, Feb. 1981, D. H. Strope et al., "Optical Inspection System."

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Substrate machining verifier does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate machining verifier, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate machining verifier will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1284851

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.