X-ray or gamma ray systems or devices – Specific application – Lithography
Patent
1998-08-26
1999-12-07
Porta, David P.
X-ray or gamma ray systems or devices
Specific application
Lithography
378208, H01J 3720
Patent
active
059995890
ABSTRACT:
A substrate holding device includes a vacuum supplying device for supplying a vacuum to a holding surface to hold a substrate, a hollow member surrounding at least a portion of the holding surface and movable between a position in which the holding member protrudes from the holding surface and a position in which the hollow member does not protrude from the holding surface, and a moving mechanism for relatively moving between the hollow member and the holding surface.
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Chiba Yuji
Hara Shin-ichi
Iwamoto Kazunori
Kurosawa Hiroshi
Marumo Mitsuji
Canon Kabushiki Kaisha
Porta David P.
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