Substrate for carrying a semiconductor chip and a...

Details Substrate for carrying a semiconductor chip and a... Substrate for carrying a semiconductor chip and a...

2006-02-14

2006-02-14

Blum, David S. (Department: 2813)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S254000

Reexamination Certificate

active

06998308

ABSTRACT:
A substrate includes a plurality of insulation layers forming a laminated structure and a built-in capacitor formed in the laminated structure, wherein the laminated structure includes a layer of baked organic polysilane.

REFERENCES:
patent: 6407929 (2002-06-01), Hale et al.
patent: 6873038 (2005-03-01), Shioga et al.
patent: 6897544 (2005-05-01), Ooi et al.
patent: 2002/0070400 (2002-06-01), Shibuya et al.
patent: 2001 068858 (2001-03-01), None
patent: 2001 274034 (2001-10-01), None

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