Substrate edge grip apparatus

Details Substrate edge grip apparatus Substrate edge grip apparatus

2007-06-05

2007-06-05

Keenan, James (Department: 3652)

Material or article handling

Horizontally swinging load support

Swinging about pivot

C414S941000, C294S116000, C901S006000

Reexamination Certificate

active

10758753

ABSTRACT:
In one embodiment, the invention is a substrate edge gripper assembly for positioning a semiconductor substrate upon a transfer robot. In one embodiment, a modular assembly comprises spring loaded jaws that are mounted on either side of a robot end effector. The jaws are adapted to be actuated by a feature remote from the robot end effector to release the substrate for delivery.

REFERENCES:
patent: 4411576 (1983-10-01), Smith et al.
patent: 4724621 (1988-02-01), Hobson et al.
patent: 5133635 (1992-07-01), Malin et al.
patent: 6155773 (2000-12-01), Ebbing et al.
patent: 6283701 (2001-09-01), Sundar et al.
patent: 6322312 (2001-11-01), Sundar
patent: 6682113 (2004-01-01), Cox et al.

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