Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1994-12-08
1996-11-19
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250307, 250309, H01J 3726
Patent
active
055765424
ABSTRACT:
Even if an observing charged beam is irradiated upon an observation cross section obliquely from above, it is possible to obtain an observation image equivalent to that obtained when the observing charged beam is irradiated thereupon vertically from above. A wafer to be observed is mounted on the stage. The stage is moved by the stage control section on the basis of coordinate data given by the coordinate inputting section to such a position that an observed position of the wafer can be located just under the ion beam irradiating unit. The ion beam of the ion beam irradiating unit is irradiated upon the wafer surface vertically to form an observation cross section. On the other hand, an electron beam is irradiated from the electron beam irradiating unit upon the observation cross section obliquely from above at an inclination angle with respect to the ion beam irradiating unit. The secondary electrons emitted from the wafer surface are detected by the detector to generate video signals. These video signals are corrected on the basis of the inclination angle, and then converted into image signals equivalent to those obtained when the observation cross section is observed in the vertical direction from above.
REFERENCES:
patent: 4725730 (1988-02-01), Kato et al.
patent: 4910398 (1990-03-01), Komatsu et al.
patent: 5029250 (1991-07-01), Komatsu
patent: 5093572 (1992-03-01), Hosono
patent: 5161201 (1992-11-01), Kaga et al.
patent: 5179280 (1993-01-01), Wang
patent: 5412210 (1995-05-01), Todokoro et al.
Anderson Bruce C.
Kabushiki Kaisha Toshiba
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