4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Yasuhiro Kaga

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Automatic focusing method for scanning electron microscopy

Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent

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Method and apparatus for measuring pattern dimension

Image analysis – Histogram processing – For setting a threshold
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Method of and apparatus for measuring pattern profile

Image analysis – Histogram processing – For setting a threshold
Patent

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Substrate cross-section observing apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Profile ID: LFUS-PAI-P-773140

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