Substrate carrier with a textured membrane

Details Substrate carrier with a textured membrane Substrate carrier with a textured membrane

2006-02-21

2006-02-21

Eley, Timothy V. (Department: 3724)

Abrading

Precision device or process - or with condition responsive...

With indicating

C451S006000, C451S041000, C451S063000, C451S288000, C451S290000, C451S398000

Reexamination Certificate

active

07001245

ABSTRACT:
A carrier head for a chemical mechanical polishing apparatus includes a membrane with an exterior grooved surface for improved chemical mechanical polishing. The exterior grooved surface provides a path for the flow of air from the portion between the membrane and a substrate.

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