Structure and method for latchup improvement using through...

Details Structure and method for latchup improvement using through... Structure and method for latchup improvement using through...

2011-08-02

2011-08-02

Nhu, David (Department: 2895)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S197000, C438S510000, C438S712000, C257SE21051, C257SE21182, C257SE21218, C257SE21247, C257SE21304, C257SE21421, C257SE21585

Reexamination Certificate

active

07989282

ABSTRACT:
A method and structure for preventing latchup. The structure includes a latchup sensitive structure and a through wafer via structure bounding the latch-up sensitive structure to prevent parasitic carriers from being injected into the latch-up sensitive structure.

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