Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2005-02-08
2005-02-08
Nelms, David (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S382000, C257S384000, C257S388000, C257S412000, C257S413000, C257S486000, C257S754000, C438S791000, C438S790000, C438S595000
Reexamination Certificate
active
06853032
ABSTRACT:
A process of forming a nitride film on a semiconductor substrate including exposing a surface of the substrate to a rapid thermal process to form the nitride film.
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Ballantine Arne W.
Johnson Donna K.
Miles Glen L.
Connolly Bove & Lodge & Hutz LLP
International Business Machines - Corporation
Nelms David
Sabo William D.
Tran Long
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