4. Drying and gas or vapor contact with solids
  5. Process
  6. Retarding or shielding of treatment

Arne W. Ballantine

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Apparatus and method for controlling wafer environment...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Apparatus and method for forming a battery in an integrated...

Semiconductor device manufacturing: process – Having integral power source
Reexamination Certificate

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Apparatus and method for forming a battery in an integrated...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – With pn junction isolation
Reexamination Certificate

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Beta control using a rapid thermal oxidation

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Beta control using a rapid thermal oxidation

Active solid-state devices (e.g. – transistors – solid-state diode – Bipolar transistor structure
Reexamination Certificate

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Profile ID: LFUS-PAI-P-797033

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