Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent
1998-06-25
1999-12-14
Tsai, Jey
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
438382, H01L 218244
Patent
active
060016809
ABSTRACT:
A static random access memory device (SRAM) keeping a resistance value of a resistance element at a predetermined level regardless a process variation, by improving a special margin of a diffusion layer region at which the resistance element is formed and a node for connecting a gate electrode thereto. In the SRAM, there is provided a diffusion layer region in a substrate, having a first part of which may form a the resistance element, a second part of which is connected to the drain or source of the MIS access transistor, and a third part of which is connected to the source or drain of the MIS driver transistor and is defined the node, and there is provided an electrode layer connecting the gate of the MIS driver transistor and the node in the diffusion layer region. The diffusion layer region is formed so that the diffusion layer region is bent at the first part which may form the resistance element and is defined the node and a first direction between the first part and the second part and a second direction between the first part and the third part intersect at an obtuse angle.
REFERENCES:
patent: 5153852 (1992-10-01), Terrell
patent: 5377140 (1994-12-01), Usuki
patent: 5570311 (1996-10-01), Ema et al.
patent: 5770496 (1998-06-01), Roberts
patent: 5827764 (1998-10-01), Liaw et al.
Hirayama Teruo
Ishida Minoru
Sony Corporation
Tsai Jey
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