Stage apparatus for an exposure apparatus including a contant te

Details Stage apparatus for an exposure apparatus including a contant te Stage apparatus for an exposure apparatus including a contant te

1994-10-14

1996-05-21

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

Work support

118500, 25044211, 269 73, C23C 1600

Patent

active

055185509

ABSTRACT:
An X-stage is moved in an X direction (horizontal direction), and a Y-stage is moved in a Y direction (vertical direction) by linear motors. The gravitational force of the Y-stage is canceled out by a constant tension spring. Tensile force irregularity in the constant tension spring is measured in advance and stored in a tensile force irregularity compensation table. The tensile force irregularity is canceled out when a controller controls an auxiliary motor.

REFERENCES:
patent: 3155383 (1964-11-01), Whitmore
patent: 4492356 (1985-01-01), Taniguchi
patent: 4896869 (1990-01-01), Takekoshi
patent: 4993696 (1991-02-01), Furukawa
patent: 5001351 (1991-03-01), Boksem
patent: 5073912 (1991-12-01), Kobayashi
patent: 5214290 (1993-05-01), Sakai
patent: 5241183 (1993-08-01), Kanai

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