Stacked capacitor having a corrugated electrode

Details Stacked capacitor having a corrugated electrode Stacked capacitor having a corrugated electrode

1997-11-10

2000-02-08

Niebling, John F.

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

438253, 438254, 438381, H01L 218234

Patent

active

060227729

ABSTRACT:
In a semiconductor device, such as a memory cell, including a capacitor, a corrugated electrode is used as a lower electrode of the capacitor and is covered with an insulation film to be opposed to an upper electrode. The corrugated electrode is specified in section by a series of folded portions which are alternately folded vertically and horizontally. Practically, the corrugated electrode is formed by a corrugated wall which surrounds a hollow space and which has a rectangular or a polygonal shape on a plane. Alternatively, the corrugated wall has an irregular surface formed by an aggregation of grains so as to effectively widen a surface of the lower electrode. Such a corrugated electrode may be manufactured by a mold which is formed by selectively etching a stack of first-kind spacer films and second-kind spacer films.

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patent: 5858853 (1999-01-01), Shishiguchi et al.

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