Sputtering chamber coil

Details Sputtering chamber coil Sputtering chamber coil

1998-07-13

2001-11-06

Davis, Antoine Duval (Department: 2913)

Machines not elsewhere specified

Heat treatment, welding or brazing

Solid material melting, e.g., solder, etc.

Design Patent

active

D0450070

CLAIM:
The design for sputtering chamber coil, as shown and described.

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Search report in PCT/US98/10058 issued 4Nov98.
U.S. Patent Application Serial No. 29/109,892 (Atty. Dkt. 3979D/PVD/DV).
U.S. Patent Application Serial No. 29/109,870 (Atty. Dkt. 3980/PVD/DV).
U.S. Patent Application Serial No. 29/109,893 (Atty. Dkt. 3981/PVD/DV).
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U.S. Patent Application Serial No. 09/049,276 Mar. 27, 1998 (Atty Dkt 938.D2/5703).
U.S. Patent Application Serial No. 09/049,839 Mar. 27, 1998 (Atty Dkt 938.D1/5702).
Applied Materials, Inc., Exhibit A, Dated Prior to Jul. 13, 1998, the filing date of the present application.(Exhibit A is a drawing of a prior art coil design which is prior to the design of the present application.).

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