Spectrum based endpointing for chemical mechanical polishing

Details Spectrum based endpointing for chemical mechanical polishing Spectrum based endpointing for chemical mechanical polishing

2007-06-05

2007-06-05

Ackun, Jr., Jacob K. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

By optical sensor

C451S285000

Reexamination Certificate

active

11213674

ABSTRACT:
Methods and apparatus for providing a flushing system for flushing a top surface of an optical head. The flushing system includes a source of gas configured to provide a flow of gas, a delivery nozzle, a delivery line that connects the source of gas to the delivery nozzle, a vacuum source configured to provide a vacuum, a vacuum nozzle, and a vacuum line that connects the vacuum source to the vacuum nozzle. The source of gas and the delivery nozzle are configured to direct a flow of gas across the top surface of the optical head. The vacuum nozzle and vacuum sources are configured so that the flow if gas is laminar.

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patent: 5879626 (1999-03-01), Waterson et al.
patent: 6599765 (2003-07-01), Boyd et al.
patent: 6942543 (2005-09-01), Kobayashi et al.
patent: 2003/0181135 (2003-09-01), Liu

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