Spectroscopic ellipsometer and polarimeter systems

Details Spectroscopic ellipsometer and polarimeter systems Spectroscopic ellipsometer and polarimeter systems

2007-01-02

2007-01-02

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

10699540

ABSTRACT:
A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system being present in an environmental control chamber.

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