Specimen-driving apparatus for electron microscope which tilts a

Details Specimen-driving apparatus for electron microscope which tilts a Specimen-driving apparatus for electron microscope which tilts a

1992-04-02

1993-11-23

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250311, H01J 3720

Patent

active

052647056

ABSTRACT:
A specimen-driving apparatus used with an electron microscope. The apparatus can translate or tilt the specimen holder while preventing it from being damaged if a human operator performs any erroneous operation. The device has X, Y, Z translation directive devices, and a tilt directive device for permitting the operator to enter instructions for translating and tilting the specimen holder. A contact detector senses that the holder is in contact with the upper magnetic pole piece. A tilt condition decision portion determines whether the holder has tilted into the positive or negative domain. A Z domain decision portion determines whether the Z coordinate of the holder lies in the positive or negative domain. When the contact of the holder with the pole piece is detected, reverse movement of the holder along the Z-axis is inhibited. Also, reverse tilting movement of the holder is inhibited. When the holder comes out of contact with the pole piece, these reverse movements are permitted.

REFERENCES:
patent: 4771178 (1988-09-01), Egle et al.
patent: 4833330 (1989-05-01), Swann et al.
patent: 4950909 (1990-08-01), Yokoto et al.
patent: 5012092 (1991-04-01), Kobayashi et al.
Published Japanese Patent Application No. 64-66204.

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