SOI radio frequency switch with enhanced signal fidelity and...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257S349000, C257S350000, C257SE29151

Reexamination Certificate

active

07999320

ABSTRACT:
A doped contact region having an opposite conductivity type as a bottom semiconductor layer is provided underneath a buried insulator layer in a bottom semiconductor layer. At least one conductive via structure extends from an interconnect-level metal line through a middle-of-line (MOL) dielectric layer, a shallow trench isolation structure in a top semiconductor layer, and a buried insulator layer and to the doped contact region. The doped contact region is biased at a voltage that is at or close to a peak voltage in the RF switch that removes minority charge carriers within the induced charge layer. The minority charge carriers are drained through the doped contact region and the at least one conductive via structure. Rapid discharge of mobile electrical charges in the induce charge layer reduces harmonic generation and signal distortion in the RF switch. A design structure for the semiconductor structure is also provided.

REFERENCES:
patent: 6562666 (2003-05-01), Park et al.
patent: 7123898 (2006-10-01), Burgener et al.
patent: 7205190 (2007-04-01), Okihara
patent: 2007/0018247 (2007-01-01), Brindle et al.
patent: 2008/0303089 (2008-12-01), Zhu et al.
patent: 2009/0200610 (2009-08-01), Nitta et al.
patent: 2009/0261355 (2009-10-01), Matsukizono et al.
patent: 2010/0148260 (2010-06-01), Kim et al.

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