Data processing: measuring – calibrating – or testing – Testing system – Of circuit
Reexamination Certificate
2006-12-19
2006-12-19
Raymond, Edward (Department: 2857)
Data processing: measuring, calibrating, or testing
Testing system
Of circuit
C438S014000
Reexamination Certificate
active
07152011
ABSTRACT:
A method of component management in a substrate processing system is disclosed. The substrate processing system has a set of components, at least a plurality of components of the set of components being designated to be smart components, each component of the plurality of components having an intelligent component enhancement (ICE). The method includes querying the plurality of components to request their respective unique identification data from their respective ICEs. The method further includes receiving unique identification data from the plurality of components if any of the plurality of components responds to the querying. The method additionally includes flagging the first component for corrective action if a first component of the plurality of components fails to provide first component unique identification data when the first component identification data is expected.
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Benjamin Neil
Bright Nicolas
Gottscho Richard Alan
Steger Robert
IP Strategy Group, P.C.
Lam Research Corporation
Raymond Edward
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