Small-dimension measurement system by scanning electron beam

Details Small-dimension measurement system by scanning electron beam Small-dimension measurement system by scanning electron beam

1984-02-02

1986-07-15

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, G01N 2300

Patent

active

046008390

ABSTRACT:
A small-dimension measurement system by scanning electron beam comprises an electron optical column including an electron source for emitting an electron beam to scan a sample, at least one pair of detectors disposed symmetrically with respect to an optical axis of the electron optical column for detecting position information from the sample by scanning of the electron beam, and a signal selecting circuit for subjecting the outputs of the paired detectors to a predetermined signal selection. The signal selecting circuit selectively and alternately provides maximum or peak portions of the outputs of the paired detectors which portions correspond to opposite edge portions of the sample. The output of the signal selecting circuit is applied to a signal processing circuit for conversion into a dimension of a predetermined pattern on the sample.

REFERENCES:
patent: 3329813 (1967-07-01), Hashimoto
patent: 3597607 (1971-08-01), Campbell et al.
patent: 3864572 (1975-02-01), van der Mast
patent: 4179604 (1979-12-01), Christon

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