Valves and valve actuation – Lost motion between actuator and valve – Check valve with external opening and closing means
Reexamination Certificate
2005-04-26
2005-04-26
Bastianelli, John (Department: 3751)
Valves and valve actuation
Lost motion between actuator and valve
Check valve with external opening and closing means
C251S330000
Reexamination Certificate
active
06883776
ABSTRACT:
A slit valve for a semiconductor processing apparatus, for fluidly sealing a passage connecting two chambers of the apparatus, such as a substrate reaction chamber and a region outside the reaction chamber. The slit valve comprises an actuator plate movable within a slot in one wall of the passage, the actuator plate and the slot oriented generally transverse to the passage. The actuator plate has a first position in which the valve is open, permitting the transfer of a substrate through the passage. The actuator plate also has a second position in which the valve is closed, and in which the actuator plate fluidly seals the passage such that fluid cannot flow through the passage across the actuator plate. A protective cover is configured to prevent debris within the passage (e.g., broken wafers, shards, particulate contaminants, etc.) from flowing into the slot when the actuator plate occupies its second position. In one embodiment, the cover is pivotably secured to the first wall of the passage, proximate the slot. In another embodiment, the cover is secured to the actuator plate, proximate an end thereof. In a preferred embodiment, the cover comprises a plate.
REFERENCES:
patent: 156877 (1874-11-01), Chinnock
patent: 2583291 (1952-01-01), Beem
patent: 2913012 (1959-11-01), McCurley
patent: 2924232 (1960-02-01), Michaels
patent: 3316929 (1967-05-01), Milette
patent: 3831900 (1974-08-01), Matousek et al.
patent: 4052036 (1977-10-01), Schertler
patent: 4714237 (1987-12-01), Linderman et al.
patent: 4921213 (1990-05-01), Geiser
patent: 4991619 (1991-02-01), della Porta
patent: 5226632 (1993-07-01), Tepman et al.
patent: 5379983 (1995-01-01), Geiser
patent: 5563798 (1996-10-01), Berken et al.
patent: 5577707 (1996-11-01), Brida
patent: 5579718 (1996-12-01), Freerks
patent: 5879461 (1999-03-01), Adams
patent: 5980194 (1999-11-01), Freerks et al.
patent: 6192827 (2001-02-01), Welch et al.
patent: 6246923 (2001-06-01), Sugimura et al.
patent: 6291814 (2001-09-01), Chuang et al.
patent: 6315512 (2001-11-01), Tabrizi et al.
patent: 6367770 (2002-04-01), Duelli
patent: 6413356 (2002-07-01), Chokshi et al.
patent: 6430468 (2002-08-01), Tepman et al.
patent: 6499367 (2002-12-01), Saeki
patent: 6553280 (2003-04-01), Johnson et al.
patent: 6719272 (2004-04-01), Iwata
patent: 411288892 (1999-10-01), None
patent: WO 0075544 (2000-06-01), None
Aggarwal Ravinder
Davis Jerry
Kusbel Jim
ASM America Inc.
Bastianelli John
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