4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...

Jim Kusbel

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Slit valve for a semiconductor processing system

Valves and valve actuation – Lost motion between actuator and valve – Check valve with external opening and closing means
Reexamination Certificate

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Slit valve for a semiconductor processing system

Valves and valve actuation – Reciprocating valve – Actuator controlled stem seal
Reexamination Certificate

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System for the improved handling of wafers within a process...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2792591

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