Single photon detector and associated methods for making the...

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Light responsive structure

Reexamination Certificate

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C257S170000, C257S199000, C257S484000, C257S603000, C257SE31058

Reexamination Certificate

active

07898001

ABSTRACT:
A semiconductor device includes a semiconductor substrate, a photon avalanche detector in the semiconductor substrate. The photon avalanche detector includes an anode of a first conductivity type and a cathode of a second conductivity type. A guard ring is in the semiconductor substrate and at least partially surrounds the photon avalanche detector. A passivation layer of the first conductivity type is in contact with the guard ring to reduce an electric field at an edge of the photon avalanche detector.

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patent: 2006/0163627 (2006-07-01), Mouli
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patent: 2009/0065704 (2009-03-01), Heringa et al.
patent: 2010/0245809 (2010-09-01), Andreou et al.
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