Single mask via method and device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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Details

C438S667000, C438S672000, C257S691000, C257S621000, C257S774000, C257SE21597

Reexamination Certificate

active

07341938

ABSTRACT:
A method of connecting elements such as semiconductor devices and a device having connected elements such as semiconductor devices. A first element having a first contact structure is bonded to a second element having a second contact structure. A single mask is used to form a via in the first element to expose the first contact and the second contact. The first contact structure is used as a mask to expose the second contact structure. A contact member is formed in contact with the first and second contact structures. The first contact structure may have an aperture or gap through which the first and second contact structures are connected. A back surface of the first contact structure may be exposed by the etching.

REFERENCES:
patent: 5089431 (1992-02-01), Slatter et al.
patent: 5821168 (1998-10-01), Jain
patent: 6218203 (2001-04-01), Khoury et al.
patent: 6417087 (2002-07-01), Chittipeddi et al.
patent: 6486059 (2002-11-01), Lee et al.
patent: 6515343 (2003-02-01), Shroff et al.
patent: 6656826 (2003-12-01), Ishimaru
patent: 6720212 (2004-04-01), Robl et al.
patent: 2002/0094661 (2002-07-01), Enquist et al.
patent: 2003/0005569 (2003-01-01), Hiatt et al.
patent: 2003/0109083 (2003-06-01), Ahmad
patent: 2003/0129796 (2003-07-01), Bruchhaus et al.
Tong, Qin-Yi et al. “Low Temperature Wafer Direct Bonding”, IEEE 1994, Journal of Microelectromechanical Systems, vol. 3, No. 1, Mar. 1994, pp. 29-35.
Gosele, U., et al., “Semiconductor Wafer Bonding, A Flexible Approach to Materials Combinations in Microelectronics, Micromechanics and Optoelectronics”, 1997 IEEE, pp. 23-32.
Takagi, Hideki et al., Low Temperature Direct Bonding of Silicon and Silicon Dioxide by the Surface Activation Method, Transducers 1997, 1997 Int. Conf. on Solid State Sensors and Actuators Jun. 16-19, 1997, pp. 657-660.
“Studies of SiO2-SiO2 Bonding with Hydrofluoric Acid—Room Temperature and Low Stress Bonding Technique for Mems”, 1998 IEEE, pp. 609-614.
K. Warner, et al., Low-Temperature Oxide-Bonded Three-Dimensional Intergrated Circuits, 2002 IEEE International SOI Conference, Oct. 2002 (pp. 123-125).

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