Single-electron device including therein nanocrystals

Details Single-electron device including therein nanocrystals Single-electron device including therein nanocrystals

1998-06-11

2000-04-25

Niebling, John F.

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

438264, 438301, 438962, 257315, 257316, H01L 21336

Patent

active

060543493

ABSTRACT:
A single-electron device includes a substrate, an insulating film provided on the substrate, a plurality of nanometer-size conductive particles formed in the insulating film along an interface between the substrate and the insulating film, and an electrode provided on the insulating film, wherein the conductive particles have a generally identical size and arranged substantially in a plane at a depth closer to the substrate.

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