Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1996-08-09
1998-09-22
Nguyen, Kiet T.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
248550, 248638, H01J 3700
Patent
active
058118217
ABSTRACT:
A single-axis active vibration reducing system for reducing vibrations in an object in a single axis. The vibration isolation system enables the sensing of motion of the center of mass of an object along a single axis and, with the proper positioning of a single sensor-actuator pair with feedback operation, the dampening of vibrations of the object along that axis. Due to the positioning and alignment of the actuator, the vibration isolation system of the present invention does not introduce appreciable off-axis vibration. The vibration reducing system includes an actuator positioned on the object to impart an actuation force along an actuator axis to reduce vibrations of the object in the vibrational axis without imparting substantial motion to the object other than in the vibrational axis.
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Alexander John D.
Kirk Michael D.
Nguyen Kiet T.
Park Scientific Instruments
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