Siloxane-based resin and method for forming insulating film...

Details Siloxane-based resin and method for forming insulating film... Siloxane-based resin and method for forming insulating film...

2006-03-28

2006-03-28

Moore, Margaret G. (Department: 1712)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From silicon reactant having at least one...

C528S034000

Reexamination Certificate

active

07019099

ABSTRACT:
Disclosed herein are siloxane-based resins prepared by hydrolyzing and polycondensing cyclic and/or cage-shape siloxane compounds, optionally with at least one silane compound, in an organic solvent in the presence of a catalyst and water. Also, disclosed herein are methods for forming insulating film between interconnect layers in semiconductor devices by using the siloxane-based resins thus prepared as low dielectric insulating materials.

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