Silicon-controlled rectifier structures on silicon-on...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257S338000, C257S357000, C257S347000, C257S350000, C257S355000, C257S368000, C257S369000, C257S107000

Reexamination Certificate

active

06987303

ABSTRACT:
A method to form a SCR device in the manufacture of an integrated circuit device is achieved. The method comprises providing a SOI substrate comprising a silicon layer overlying a buried oxide layer. The silicon layer further comprises a first well of a first type and a second well of a second type. A first heavily doped region of the first type is formed in the second well to form an anode terminal. A second heavily doped region of the second type is formed in the first well to form a cathode terminal and to complete the SCR device. A gate isolation method is described. A salicide method is described. LVT-SCR methods, including a floating-well, LVT-SCR method, are described.

REFERENCES:
patent: 5012317 (1991-04-01), Rountre
patent: 5530612 (1996-06-01), Maloney
patent: 5629544 (1997-05-01), Voldman et al.
patent: 5945714 (1999-08-01), Yu
patent: 5949634 (1999-09-01), Yu
patent: 6242763 (2001-06-01), Chen et al.
patent: 6465848 (2002-10-01), Ker et al.
patent: 6750515 (2004-06-01), Ker et al.

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