Monochromator system and applications thereof

Details Monochromator system and applications thereof Monochromator system and applications thereof

2006-01-03

2006-01-03

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By dispersed light spectroscopy

With monochromator structure

C356S328000, C356S367000, C356S369000

Reexamination Certificate

active

06982789

ABSTRACT:
A monochromator system applicable in spectrophotometer, polarimeter and ellipsometer systems which operate over a large range of wavelengths, including a stage which enables position adjustment of the location of a source of electromagnetic radiation in lateral (X), longitudinal (Y) and vertical (Z) directions, from a common location outside an enclosure, and including multiple detector systems mounted in a manner which allows easily, sequentially, via mechanical motion, placing a first and then a second thereof so as to receive a beam of electromagnetic radiation.

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