Signal improvement in eddy current sensing

Details Signal improvement in eddy current sensing Signal improvement in eddy current sensing

2006-03-21

2006-03-21

Assouad, Patrick J. (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Electrical signal parameter measurement system

C702S097000, C702S170000, C324S229000, C324S228000, C324S230000

Reexamination Certificate

active

07016795

ABSTRACT:
Improved endpoint detection and/or thickness measurements may be obtained by correcting sensor data using calibration parameters and/or drift compensation parameters. Calibration parameters may include an offset and a slope, or other parameters. Drift compensation parameters may include off-wafer measurements.

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