Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-05-23
2006-05-23
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000
Reexamination Certificate
active
07049585
ABSTRACT:
An electron beam apparatus such as a sheet beam based testing apparatus has an electron-optical system for irradiating an object under testing with a primary electron beam from an electron beam source, and projecting an image of a secondary electron beam emitted by the irradiation of the primary electron beam, and a detector for detecting the secondary electron beam image projected by the electron-optical system. Specifically, the electron beam apparatus comprises beam generating means2004for irradiating an electron beam having a particular width, a primary electron-optical system2001for leading the beam to reach the surface of a substrate2006under testing, a secondary electron-optical system2002for trapping secondary electrons generated from the substrate2006and introducing them into an image processing system2015, a stage2003for transportably holding the substrate2006with a continuous degree of freedom equal to at least one, a testing chamber for the substrate2006, a substrate transport mechanism for transporting the substrate2006into and out of the testing chamber, an image processing analyzer2015for detecting defects on the substrate2006, a vibration isolating mechanism for the testing chamber, a vacuum system for holding the testing chamber at a vacuum, and a control system2017for displaying or storing positions of defects on the substrate2006.
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Karimata Tsutomu
Kimba Toshifumi
Nakasuji Mamoru
Noji Nobuharu
Oowada Shin
Berman Jack I.
Ebara Corporation
Westerman, Hattori, Daniels & Adrian , LLP.
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