Shallow trench isolation process using chemical-mechanical polis

Details Shallow trench isolation process using chemical-mechanical polis Shallow trench isolation process using chemical-mechanical polis

1998-03-25

2000-05-02

Niebling, John F.

Semiconductor device manufacturing: process

Formation of electrically isolated lateral semiconductive...

Grooved and refilled with deposited dielectric material

438425, 438427, H01L 2176

Patent

active

060572078

ABSTRACT:
A method of planarizing a non-conformal oxide layer 40 forming shallow trench isolation between active areas 12 in a substrate. The invention uses a first chemical-mechanical polish (CMP) step to form openings 50 only over wide active areas. An etch is used to remove oxide 40 from only over the wide active areas 12A. A second CMP step is used to planarized the oxide layer 40. The invention begins by forming spaced trenches 30 in said substrate 10 defining active areas 12. A first insulating layer 40 composed of a non-conformal silicon oxide is formed by a HDPCVD process over the substrate and fills the trenches 30. A etch barrier layer 44 is formed over the first insulating layer 40. In a first chemical-mechanical polish (CMP) step, the conformal etch barrier layer 44 over only the wide raised portions 12A is polished to form a self-aligned first openings 50. The chemical-mechanical polishing of the conformal etch barrier layer forms a self-aligned etch mask. The first insulating layer 40 is then etched through at least the first opening 50 to expose a first barrier layer 24 over the wide active areas 12A. In a second CMP step, the etch barrier layer 44 is removed and the first insulating layer 40 is planarized to fill the shallow trenches 30.

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