Shadow mask deposition of materials using reconfigurable...

Details Shadow mask deposition of materials using reconfigurable... Shadow mask deposition of materials using reconfigurable...

2007-09-18

2007-09-18

Zarneke, David A. (Department: 2891)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

Multiple layers

C118S721000, C257SE21294, C257SE21295, C257SE21297, C257SE21299

Reexamination Certificate

active

11147508

ABSTRACT:
A shadow mask deposition system includes a plurality of identical shadow masks arranged in a number of stacks to form a like number of compound shadow masks, each of which is disposed in a deposition vacuum vessel along with a material deposition source. Materials from the material deposition sources are deposited on the substrate via openings in corresponding compound shadow masks, each opening being formed by the whole or partial alignment of apertures in the shadow masks forming the compound shadow mask, to form an array of electronic elements on the substrate.

REFERENCES:
patent: 3657613 (1972-04-01), Brody et al.
patent: 4450786 (1984-05-01), Doehler et al.
patent: 4592306 (1986-06-01), Gallego
patent: 4615781 (1986-10-01), Boudreau
patent: 5250467 (1993-10-01), Somekh et al.
patent: 5330628 (1994-07-01), Demaray et al.
patent: 5405652 (1995-04-01), Kashiwagi et al.
patent: 5643428 (1997-07-01), Krivokapic et al.
patent: 6281552 (2001-08-01), Kawasaki et al.
patent: 6384529 (2002-05-01), Tang et al.
patent: 6489176 (2002-12-01), Ninomiya
patent: 6582504 (2003-06-01), Fujita
patent: 6677174 (2004-01-01), Kim et al.
patent: 6791258 (2004-09-01), Haase et al.
patent: 6943066 (2005-09-01), Brody et al.
patent: 7132016 (2006-11-01), Brody et al.
patent: 7132361 (2006-11-01), Brody et al.
patent: 2002/0009538 (2002-01-01), Arai
patent: 2002/0179013 (2002-12-01), Kido et al.
patent: 2003/0228715 (2003-12-01), Brody et al.
T. Peter Brody; “The Birth And Early Childhood Of Active Matrix—A Personal Memoir”; Journal of the SID, 4/3; (1996).

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