Setter tile for use in sintering of ceramic substrate laminates

Compositions: ceramic – Ceramic compositions – Refractory

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Details

501103, 501108, 501133, 501127, 501153, C04B 3558

Patent

active

050533614

ABSTRACT:
There is disclosed a partially sintered setter tile for use in the removal of carbon from multilayer ceramic substrate laminate during the sintering thereof. A multilayer ceramic substrate laminate having metallic lines and vias is provided with a reducible metal oxide in a partially sintered setter tile in close proximity to the substrate laminate. The multilayer ceramic substrate laminate contains a polymeric binder which upon heating depolymerizes into carbon. The substrate laminate and partially sintered setter tile are sintered in an atmosphere which is reducing with respect to the reducible metal oxide and which is oxidizing with respect to the carbon.

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patent: 4900698 (1990-02-01), Lundsager

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