Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2004-10-26
2008-10-21
Chowdhury, Tarifur R (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
Reexamination Certificate
active
07440091
ABSTRACT:
An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors. In another embodiment, an apparatus for detecting substrate defects includes a robot having a substrate support surface, and a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate during substrate transfer on the substrate support surface. In another embodiment, a method of continuously detecting substrate defects includes positioning at least two sensors to continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors, and transmitting a signal from each of the at least two sensors to a controller that continuously monitors the signals from the at least two sensors to detect the presence of a substrate defect.
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Bagley William A.
Hoffman James
Inagawa Makoto
Kim Kyung-Tae
Kim Sam
Applied Materials Inc.
Chowdhury Tarifur R
Hansen Jonathan M
Patterson & Sheridan LLP
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