Semiconductor device manufacturing: process – Semiconductor substrate dicing – Having specified scribe region structure
Reexamination Certificate
2006-03-28
2008-12-23
Zarneke, David A (Department: 2891)
Semiconductor device manufacturing: process
Semiconductor substrate dicing
Having specified scribe region structure
C257SE21599, C438S015000
Reexamination Certificate
active
07468309
ABSTRACT:
A semiconductor wafer treatment method for dividing an adhesive tape, which has been stuck to the entire back of a semiconductor wafer, along divided streets of the semiconductor wafer. Before division of the adhesive tape by application of laser beams, the state of the divided streets is detected, and laser beams are applied to the adhesive tape based on such detection.
REFERENCES:
patent: 7390681 (2008-06-01), Tristan
patent: 2002-118081 (2002-04-01), None
Shigematsu Koichi
Yoshikawa Toshiyuki
Disco Corporation
Smith , Gambrell & Russell, LLP
Zarneke David A
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