Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Patent
1996-07-24
1998-12-15
Walberg, Teresa J.
Heating
Accessory means for holding, shielding or supporting work...
Support structure for heat treating ceramics
432241, 432253, 432259, 392418, F27D 500
Patent
active
058488898
ABSTRACT:
An annular-shaped edge ring support for a semiconductor wafer has an innermost radial portion for supporting the semiconductor wafer and an outermost radial portion contiguous with the inner portion. The inner portion has a graded thermal mass that generally increases with increasing radius.
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Ballance David S.
Bierman Benjamin
Tietz James V.
Applied Materials Inc.
Lu Jiping
Walberg Teresa J.
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