Semiconductor wafer holder with spring-mounted temperature measu

Details Semiconductor wafer holder with spring-mounted temperature measu Semiconductor wafer holder with spring-mounted temperature measu

1998-10-27

2000-07-04

Jeffery, John A.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

21944811, 219385, 118725, 118728, 118500, 374208, 324765, 324760, H01L 21205, H01L 2166

Patent

active

060842156

ABSTRACT:
A temperature measuring unit of a wafer chuck measures the temperature of a wafer chuck when the wafer chuck holding a wafer W making in-unison contact with a contactor is made to contact a bottom jacket and the bottom jacket controls the wafer W to a specific test temperature. At least three recessed sections are formed in the back of the wafer chuck in such a manner that they have a depth extending from the back of the chuck to the vicinity of its surface. Through holes corresponding to the recessed sections are made in the bottom jacket. Temperature sensors that can be inserted into the through holes and in the recessed sections are provided on the side opposite to the wafer chuck of the bottom jacket. The sensors are supported by springs. During a test, the tips of the temperature sensors are caused to make elastic contact with the recessed sections.

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